A novel large displacement electrostatic actuator: Pre-stress comb-drive actuator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 9, 2005, Pages 1641-1648

  Chiou, J C ^a   Lin, Y J ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; HEAT TREATMENT; HYSTERESIS; LOADS (FORCES); MATHEMATICAL MODELS;

COMPOSITE BEAMS; ELECTROSTATIC FORCES; MOTION RANGE; PRE-STRESS COMB-DRIVE ACTUATORS (PCA);

ACTUATORS;

EID: 23944452967     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/9/005     Document Type: Article

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