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New Diamond and Frontier Carbon Technology

Volumn 15, Issue 3, 2005, Pages 105-122

Production of amorphous carbon nitrides from deposition of CN radicals

(1) Ito, Haruhiko a

a NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

Amorphous carbon nitride; Ar ion; Ar metastable atoms; CN radicals; Laser induced fluorescence spectroscopy

Indexed keywords

CHARGE TRANSFER; DEPOSITION; ELECTRONS; FREE RADICALS; HYDROGENATION; KINETIC ENERGY; PROBABILITY DENSITY FUNCTION; RAYLEIGH FADING;

DIAMOND-LIKE CARBON (DLC); FILM FORMATION; HYDROGEN-TERMINATED STRUCTURES; OPTICAL EMISSION SPECTROSCOPY (OES);

CARBON NITRIDE;

EID: 23844514365 PISSN: 13449931 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (3)

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