Laser-assisted maskless Cu patterning on porous silicon

Electrochemical and Solid-State Letters

Volumn 7, Issue 5, 2004, Pages

  Sasano, Junji ^a   Schmuki, Patrik ^b   Sakka, Tetsuo ^a   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; DEPOSITION; ELECTRODES; ELECTROPLATING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER BEAMS; POLARIZATION; SPUTTERING;

GALVANOSTATIC ANODIZATION; POROUS SILICON (PS); ROTATING DISK ELECTRODES (RDE);

SILICON;

EID: 2342537057     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1667795     Document Type: Article

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