Growth kinetics for copper deposition on Si(100) from pyrophosphate solution

Journal of the Electrochemical Society

Volumn 147, Issue 7, 2000, Pages 2576-2580

  Hoffmann, Peter M ^a   Radisic, Aleksandar ^a   Searson, Peter C ^a  

^a Whiting School of Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DEPOSITION; NUCLEATION; PHOSPHATES;

PYROPHOSPHATE;

SEMICONDUCTING SILICON;

EID: 0034229406     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393571     Document Type: Article

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