Electron-beam induced nanomasking for metal electrodeposition on semiconductor surfaces

Journal of the Electrochemical Society

Volumn 148, Issue 3, 2001, Pages

  Djenizian, T ^a   Santinacci, L ^a   Schmuki, P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000324309     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1348258     Document Type: Article

References (5)

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4. X. Pan, D. R. Allee, A. N. Broers, Y. S. Tang, and W. Wilkinson, Appl. Phys. Lett., 59, 3157 (1991).
5. T. O. Sedgwick, A. N. Broers, and B. J. Agule, J. Electrochem. Soc., 119, 1769 (1972).