Phase modulated ellipsometry from the ultraviolet to the infrared: In situ application to the growth of semiconductors

Progress in Crystal Growth and Characterization of Materials

Volumn 27, Issue 1, 1993, Pages 1-87

  Drevillon B ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELLIPSOMETRY; FILM GROWTH; SPECTROSCOPY;

ELLIPSOMETRIC METHODS; GROWTH MONITORING;

SEMICONDUCTING FILMS;

EID: 0027882071     PISSN: 09608974     EISSN: None     Source Type: Journal    
DOI: 10.1016/0960-8974(93)90021-U     Document Type: Article

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