The role of higher silanes in silane-discharge particle growth

Journal of Applied Physics

Volumn 98, Issue 1, 2005, Pages

  Bano, Gregory ^a   Horvath, Peter ^a   Rozsa, Karoly ^a   Gallagher, Alan ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE INITIATION; ISOTHERMAL CHAMBER; PARTICLE AGGLOMERATION; SILICON FILMS;

AGGLOMERATION; ELEMENTARY PARTICLES; FILM GROWTH; HYDROGENATION; ION BOMBARDMENT; LASER BEAMS; PLASMA APPLICATIONS; THIN FILMS;

SILANES;

EID: 22944441945     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1947895     Document Type: Article

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