Patterning of octadecyisiloxane self-assembled monolayers on Si(100) using Ar(3P0,2) atoms

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 3, 1999, Pages 1087-1089

  Hill, S B ^a  

^a RICE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450715     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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