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Volumn 79, Issue 8 PART 2B, 1996, Pages 6079-6083

Nanostructure fabrication via laser-focused atomic deposition (invited)

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EID: 0000529757     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362099     Document Type: Article
Times cited : (48)

References (34)
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    • edited by B. Heinrich and J. A. C. Bland Springer, Berlin
    • See, e.g., A. Fert and P. Bruno, in Ultrathin Magnetic Structures II, edited by B. Heinrich and J. A. C. Bland (Springer, Berlin, 1994), p. 82.
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    • S. Y. Chou, M. S. Wei, and P. B. Fischer, IEEE Trans. Magn. 30, 4485 (1994); S. Y. Chou, M. Wei, P. R. Krauss, and P. B. Fischer, J. Vac. Sci. Technol. B 12, 3695 (1994).
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    • Chou, S.Y.1    Wei, M.S.2    Fischer, P.B.3
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    • See, e.g., J. Opt. Soc. Am. B 2, 1706 (1985); ibid. 6, 2020 (1989).
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    • See, e.g., J. Opt. Soc. Am. B 2, 1706 (1985); ibid. 6, 2020 (1989).
    • (1989) J. Opt. Soc. Am. B , vol.6 , pp. 2020
  • 20
    • 0001548264 scopus 로고
    • See, e.g., J. E. Bjorkholm R. R. Freeman, A. Ashkin, and D. B. Pearson, Phys. Rev. Lett. 41, 1361 (1978); V. I. Balykin, V. S. Letokhov, Yu. B. Ovchinnikov, and A. I. Sidorov, J. Mod. Opt. 35, 17 (1988); J. J. McClelland and M. R. Scheinfein, J. Opt. Soc. Am. B 8, 1974 (1991).
    • (1978) Phys. Rev. Lett. , vol.41 , pp. 1361
    • Bjorkholm, J.E.1    Freeman, R.R.2    Ashkin, A.3    Pearson, D.B.4
  • 21
    • 0023825619 scopus 로고
    • See, e.g., J. E. Bjorkholm R. R. Freeman, A. Ashkin, and D. B. Pearson, Phys. Rev. Lett. 41, 1361 (1978); V. I. Balykin, V. S. Letokhov, Yu. B. Ovchinnikov, and A. I. Sidorov, J. Mod. Opt. 35, 17 (1988); J. J. McClelland and M. R. Scheinfein, J. Opt. Soc. Am. B 8, 1974 (1991).
    • (1988) J. Mod. Opt. , vol.35 , pp. 17
    • Balykin, V.I.1    Letokhov, V.S.2    Ovchinnikov, Yu.B.3    Sidorov, A.I.4
  • 22
    • 42149122869 scopus 로고
    • See, e.g., J. E. Bjorkholm R. R. Freeman, A. Ashkin, and D. B. Pearson, Phys. Rev. Lett. 41, 1361 (1978); V. I. Balykin, V. S. Letokhov, Yu. B. Ovchinnikov, and A. I. Sidorov, J. Mod. Opt. 35, 17 (1988); J. J. McClelland and M. R. Scheinfein, J. Opt. Soc. Am. B 8, 1974 (1991).
    • (1991) J. Opt. Soc. Am. B , vol.8 , pp. 1974
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    • note
    • Uncertainty estimates are intended to be interpreted as one standard deviation combined random and systematic error, unless otherwise noted. The uncertainty in the line width in this case is dominated by variation in a sample of widths measured from the image in Fig. 3. The height uncertainties are dominated by systematic uncertainties in the calibration of the AFM and the total deposition measurement.


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