Amorphous Mo-N and Mo-Si-N films in microelectromechanical systems

Fatigue and Fracture of Engineering Materials and Structures

Volumn 28, Issue 8, 2005, Pages 743-749

  Kattelus, Hannu ^a   Ylonen M ^a   Blomberg, M ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Amorphous metals; Metallic micromachining; Mo N; Mo Si N; Nanoindentation

Indexed keywords

AMORPHOUS ALLOYS; ELASTIC MODULI; ELECTRIC PROPERTIES; HARDNESS; INDENTATION; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOTECHNOLOGY; POLYCRYSTALLINE MATERIALS; POLYMERS; THIN FILMS;

AMORPHOUS METALS; METALLIC MICROMACHINING; METALLIC THIN FILMS; NANOINDENTATION;

MOLYBDENUM ALLOYS;

EID: 22544452704     PISSN: 8756758X     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1460-2695.2005.00887.x     Document Type: Article

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