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Journal of Photopolymer Science and Technology

Volumn 18, Issue 4, 2005, Pages 537-542

Fidelity of photo-nanoimprint

(1) Hiroshima, Hiroshi a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Line edge roughness; Photo nanoimprint; Scaling analysis; White noise

Indexed keywords

EID: 22144491185 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.18.537 Document Type: Article

Times cited : (2)

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