Compact, high-resolution homodyne interferometer for nanometer-scale, multidimensional AFM metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5532, Issue , 2004, Pages 229-236

  Gonda, Satoshi ^a   Kinoshita, Kazuto ^a   Noguchi, Hironori ^a   Koyanagi, Hajime ^a   Terasawa, Tsuneo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Atomic force microscopy; Critical dimension; Dimensional metrology; Interferometry; Scanning force microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; MEASUREMENTS; SCANNING; SENSITIVITY ANALYSIS; SENSORS; SILICON WAFERS;

CRITICAL DIMENSIONS; DIMENSIONAL METROLOGY; SCANNING FORCE MICROSCOPY;

INTERFEROMETERS;

EID: 15744378782     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559173     Document Type: Conference Paper

References (17)

1. International Technology Roadmap for Semiconductors, 2003 Edition.
2. J. E. Griffith, G. L. Miller, C. A. Green, D. A. Grigg, P. E. Russell, J. Vac. Sci. Technol. B 8, (1990) 2023.
3. O. Jusko, X. Zhao, H. Wolff, G. Wilkening, Rev. Sci. Instrum. 65, (1994) 2514.
4. Y. Xu, S. T. Smith, P. D. Atherton, Precis. Eng. 19, (1996) 46.
5. G. B. Picotto, S. Desogus, S. Lanyi, R. Nerino, A. Sosso, J. Vac. Sci. Technol. B 14, (1996) 897.
6. A. E. Holman, C. D. Laman, P. M. L. O. Scholte, W. Chr. Heerens, F. Tuinsta, Rev. Sci. Instrum. 67, (1996) 2274.
7. E. C. Teague, J. Vac. Sci. Technol. B 7, (1989) 1898.
8. H. Yamada, T. Fujii, K. Nakayama, Jpn. J. Appl. Phys., Part 1 28, (1989) 2402.
9. J. Schneir, T. H. McWaid, J. Alexander, B. P. Wilfley, J. Vac. Sci. Technol. B 12, (1994) 3561.
10. T. Fujii, M. Yamaguchi, M.Suzuki, Rev. Sci. Instrum. 66, (1995) 2504.
11. F. Meli, R. Thalmann, Meas. Sci. Technol. 9, (1998) 1087.
12. S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, Rev. Sci. Instrum. 70, (1999) 3362.
13. J. Haycocks, K. Jackson, Proc. of the 2nd Euspen. Conference, Torino, Italy, (2001) 392.
14. H. Fujimoto, M. Tanaka, K. Nakayama, IEEE Trans. Instrum. Meas. 44, (1995) 471.
15. G. E. Sommargren, Precision Eng. 9, (1987) 179.
16. M. J. Downs, W. R. C. Rowley, Precision Eng. 15, (1993) 281.
17. S. Gonda, T. Kurosawa, Y. Tanimura, Meas. Sci. Technol. 10, (1999) 986.