A surface micro-machined amorphous GexSi1-xO y bolometer for thermal imaging applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5578, Issue PART 1, 2004, Pages 298-308

  Ahmed, A H Z ^a   Tait, R N ^a   Oogarah, T ^b   Liu, H C ^b   Denhoff, M W ^b   Sproule, G I ^b   Graham, M J ^b  

^a CARLETON UNIVERSITY   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Bolometer; Infrared imaging; MEMS; Micromachining

Indexed keywords

BOLOMETERS; GERMANIUM; GERMANIUM COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESISTORS; SILICON; SURFACE PROPERTIES;

ACTIVE RESISTORS; MEMS; MICROBOLOMETERS; THERMAL IMAGING APPLICATIONS;

INFRARED IMAGING;

EID: 21944448344     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567612     Document Type: Conference Paper

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