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Volumn 22, Issue 3, 2004, Pages 842-846

Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BOLOMETERS; DETECTORS; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; ENERGY UTILIZATION; INFRARED IMAGING; INFRARED RADIATION; MICROMACHINING; PHOTORESISTS; POLYIMIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SPECIFIC HEAT; SUBSTRATES; TITANIUM;

EID: 3142531332     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1722404     Document Type: Conference Paper
Times cited : (13)

References (17)
  • 5
    • 0003606316 scopus 로고    scopus 로고
    • edited by P. W. Kruse and D. D. Skatrud, Semiconductors and Semimetals (Academic, San Diego)
    • R. A. Wood in Uncooled Infrared Imaging Arrays and Systems, edited by P. W. Kruse and D. D. Skatrud, Semiconductors and Semimetals (Academic, San Diego, 1997), Vol. 47.
    • (1997) Uncooled Infrared Imaging Arrays and Systems , vol.47
    • Wood, R.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.