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Volumn 22, Issue 3, 2004, Pages 842-846
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Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS MATERIALS;
BOLOMETERS;
DETECTORS;
ELECTRIC CONDUCTIVITY;
ELECTRIC RESISTANCE;
ENERGY UTILIZATION;
INFRARED IMAGING;
INFRARED RADIATION;
MICROMACHINING;
PHOTORESISTS;
POLYIMIDES;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR MATERIALS;
SPECIFIC HEAT;
SUBSTRATES;
TITANIUM;
CURRENT FLOW;
INCIDENT RADIATION;
INFRARED THERMAL IMAGING;
TEMPERATURE COEFFICIENT OF RESISTANCE (TCR);
MOS DEVICES;
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EID: 3142531332
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1722404 Document Type: Conference Paper |
Times cited : (13)
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References (17)
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