Growth of epitaxial ZnO thin films on lattice-matched buffer layer: Application of InGaO3(ZnO)6 single-crystalline thin film

Thin Solid Films

Volumn 486, Issue 1-2, 2005, Pages 28-32

  Takeda, Yujiro ^a   Nomura, Kenji ^a   Ohta, Hiromichi ^a,b   Yanagi, Hiroshi ^a   Kamiya, Toshio ^a   Hirano, Masahiro ^a   Hosono, Hideo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Electrical properties and measurements; Epitaxy; Surface morphology; Zink oxide

Indexed keywords

CRYSTAL LATTICES; EPITAXIAL GROWTH; INDIUM COMPOUNDS; SINGLE CRYSTALS; SURFACES; ZINC OXIDE;

FILM MICROSTRUCTURE; FILM THICKNESS; FLAT SURFACES; LATTICE MATCHING;

THIN FILMS;

EID: 21844472529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.12.045     Document Type: Conference Paper

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