A multi-layer plastic/glass technology for microfluidic systems with integrated functionality

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1315-1318

  Han, A ^a   Graff, M ^a   Wang, O ^a   Mohanty, S K ^a   Han, K H ^a   Frazier, A B ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bonding; Electrodes; Embossing; Fluidic microsystems; Glass; Microchannel; Microfluidics; Microvalves; Plastics; Polyethylene

Indexed keywords

ACTUATORS; BONDING; ELASTOMERS; ELECTRODES; FLUIDIC DEVICES; GLASS; GLASS BONDING; MICROCHANNELS; MICROFLUIDICS; MICROSYSTEMS; PLASTICS; POLYETHYLENES; TRANSDUCERS; VALVES (MECHANICAL);

ELECTRICAL COMPONENTS; EMBOSSING; FLUIDIC MICROSYSTEMS; INTERCONNECT TECHNOLOGY; MEMS FABRICATION TECHNIQUES; MICRO FLUIDIC SYSTEM; MICRO VALVES; MICROSTENCILING;

SOLID-STATE SENSORS;

EID: 84944746765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217015     Document Type: Conference Paper

References (6)

1. J. M. Ramsey, Nature Biotechnology, Vol. 17, pp. 1061-1062, 1999.
2. Y. C. Su and L. Lin, Proceeding for 14th IEEE Microelectromechanical Systems, pp. 50-53, 2001.
3. A. Puntambekar and C. H. Ahn, Micro Total Analysis Systems 2000, pp. 323-326, 2000.
4. H. E. Ayliffe, A. B. Frazier, and R. D. Rabbitt, IEEE J. Microelectromechanical Systems, Vol. 8, No. 1, pp. 50-57, 1999.
5. S. K. Mohanty, M. Graff, K. Ravula, A. Han, and A. B. Frazier, Micro Total Analysis Systems 2001, pp. 387-388, 2001.
6. A. Satoh, Sensors and Actuators A72, pp. 160-168, 1999.