Design and analysis of a dynamic MEM chemical sensor

Proceedings of the American Control Conference

Volumn 2, Issue , 2001, Pages 1214-1218

  Turner, K L ^a   Zhang, W ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHEMICAL SENSORS; CHEMICALS; DAMPING; DESIGN; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; EQUATIONS OF MOTION; MATHEMATICAL MODELS;

ELECTROSTATIC ACTUATION; MATHIEU EQUATION; PARAMETRIC RESONANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0034852496     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/acc.2001.945887     Document Type: Conference Paper

References (9)

1. Five parametric resonances in a MicroElectroMechanical system
2. Understanding parametric resonance effects in common MEM actuators
3. Microcantilever sensors
4. Chemical sensor based on quartz microresonators
5. Micromechanical scanning probe instruments for array architectures
6. Application and analysis of parametric resonance in MicroElectroMechanical systems
7. Three dimensional MEMS motion characterization using laser vibrometry
8. SCREAM-I, A single-mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures