Ion species and electron behavior in capacitively coupled Ar and O 2 plasma

Journal of Applied Physics

Volumn 96, Issue 11, 2004, Pages 6039-6044

  Seo, Hyungtak ^a   Kim, Jung Hyung ^a   Shin, Yong Hyeon ^a   Chung, Kwang Hwa ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DISSOCIATION; FREQUENCIES; MASS SPECTROMETERS; OXYGEN; PLASMAS;

ION DENSITY; PLASMA FREQUENCY; QUADRUPOLE MASS SPECTROMETERS (QMS); WAVE CUTOFF METHOD;

CARRIER CONCENTRATION;

EID: 19144372596     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1809253     Document Type: Article

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