Chemical sputtering of ta-C: Implications for the deposition of carbon nitride

Journal of Applied Physics

Volumn 89, Issue 10, 2001, Pages 5754-5759

  Morrison, N A ^a   Rodil, S E ^a   Robertson, J ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035873754     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1359170     Document Type: Article

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