Excimer laser ablation of polymers and glasses for grating fabrication

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 537-549

  Dyer, P E ^a   Farley, R J ^a   Giedl, R ^a   Karnakis, D M ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; EXCIMER LASERS; GLASS; HOLOGRAPHY; LIGHT ABSORPTION; LIGHT TRANSMISSION; MASKS; MATHEMATICAL MODELS; OPTOELECTRONIC DEVICES; ORGANIC POLYMERS; PHOTONS; ULTRAVIOLET RADIATION;

CONTACT PRINTING MODE; EXCIMER LASER ABLATION; EXCIMER LASER ILLUMINATED PHASE MASKS; GRATING FABRICATION; LASER INDUCED PERIODIC SURFACE STRUCTURES; SUBMICRON PERIOD GRATINGS; TALBOT REIMAGING ARRANGEMENT; ULTRAVIOLET HOLOGRAPHIC TECHNIQUES;

LASER ABLATION;

EID: 0030562987     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00528-5     Document Type: Article

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