AFM tip calibration using nanometer-sized structures induced by ion beam sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 225-234

  Frost, Frank ^a   Hirsch, Dietmar ^a   Schindler, Axel ^a   Rauschenbach, Bernd ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

AFM tip; Atomic force microscopy; Morphology; Sputtering; Thin film; Topography

Indexed keywords

CALIBRATION; IMAGE ANALYSIS; MORPHOLOGY; SEMICONDUCTOR MATERIALS; STATISTICS; SURFACE ROUGHNESS; SURFACE STRUCTURE; THIN FILMS;

ION BEAM SPUTTERING; LOW ENERGY ION SPUTTERING; THIN FILM TECHNOLOGIES;

ATOMIC FORCE MICROSCOPY;

EID: 0035761229     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450098     Document Type: Article

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