Modeling of broad beam ion sources

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 1147-1149

  Tartz, M ^a   Hartmann, E ^a   Scholze, F ^a   Neumann, H ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038202487     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148652     Document Type: Conference Paper

References (7)

1. J. M. E. Harper, J. J. Cuomo, and H. R. Kaufman, J. Vac. Sci. Technol. JVSTAL 21, 737 (1982)
2. T. A. Grotjohn, Rev. Sci. Instrum. RSINAK 65, 1298 (1994)
3. J. Waldorf, Nucl. Instrum. Methods Phys. Res. B NIMBEU 113, 8 (1996).
4. M. Tartz, E. Hartmann, F. Scholze, H. Neumann, and F. Bigl, Surf. Coat. Technol. (in press).
5. M. Tartz, E. Hartmann, and H. Neumann, Proceedings of the 2nd European Spacecraft Propulsion Conference, 27–29 May, 1997, Noordwijk, NL (ESA SP, 398).
6. R. Becker and W. B. Herrmannsfeldt, Rev. Sci. Instrum. RSINAK 63, 2756 (1992).
7. D. Rapp and W. E. Francis, J. Chem. Phys. JCPSA6 37, 2631 (1962).