Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

Vacuum

Volumn 48, Issue 7-9, 1997, Pages 665-668

  Viera, G ^a   Sharma, S N ^a   Costa, J ^a,b   Zhang, R Q ^a,c   Andujar J L ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF GIRONA   (Spain)

^c SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DIFFRACTION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; NANOSTRUCTURED MATERIALS; PARTICLES (PARTICULATE MATTER); POWDERS; RAMAN SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

RADIOFREQUENCY SQUARE WAVE MODULATED GLOW DISCHARGES;

SILICON CARBIDE;

EID: 0031220278     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00055-9     Document Type: Article

References (17)

1. Proceedings of the 391 National Symposium of the American Vacuum Society, Part I, J. Vac. Sci. Technol A, 1994, 11, 1119-1141.
2. Bertran, E., Costa, J., Sardin, G., Campmany, J., Andújar, J. L. and Canillas, A., Plasma Sources Sci Technol, 1994, 3, 348.
3. Costa, J., Sardin, G., Campmany, J., Andújar, J. L., Canillas, A. and Bertran, E., Mater Res Soc Symp Proc, 1993, 297, 1031.
4. Roura, P., Costa, J., Sardin, G., Morante, J. R. and Bertran, E., Phys Rev B, 1994, 50, 18124-18133.
5. Greil, P., Petzow, G. and Tanaka, H., Ceram Intern, 1987, 13, 19.
6. Chen, J. W. and Xue, L. A., J Am Ceram Soc, 1994, 73, 421.
7. Kasemann, R. and Schmidt, H., New J Chem, 1994, 18, 1117.
8. Bertran, E., Costa, J., Viera, G. and Zhang, R. Q., J Vac Sci Technol A, 1996, 14, 567.
9. Costa, J., Viera, G., Zhang, R. Q., Andújar, J. L., Pascual E. and Bertran, E., Mat Res Soc Symp Proc, 1996, 410, 173.
10. Raveh, A., Inspektor, A. and Carmi, U., Avni, R., J Vac Sci Technol A, 1987, 5, 2836.
11. Costa, J., Sardin, G., Campmany, J. and Bertran, E., Vacuum, 1994, 45, 1117.
12. Horwitz, C. M., J Vac Sci Technol A, 1983, 1, 1795.
13. Courteille, C., Hollenstein, Ch., Dorier, J.-L., Gay, P., Scharzenbach, W., Howling, A. A., Bertran, E., Viera, G., Martins R. and Macarico, A., J Appl Phys., 1996, 80, 2069.
14. Taylor, T. N., J Mater Res, 1989, 4, 189.
15. Wieder, H., Cardona, M. and Guarniv, R. C., Phys Stat Sol, 1979, 92, 99.
16. Hicks, S. E., Fitzgerald, A. G. and Baker, S. H., Phil Mag B, 1990, 62, 193.
17. Socrates, G., Characteristic Group Frequencies, Wiley, New York (1980) p 27.