메뉴 건너뛰기




Volumn 30, Issue 1, 1997, Pages 9-18

Amorphous hydrogenated carbon films for tribological applications I. Development of moisture insensitive films having reduced compressive stress

Author keywords

Amorphous carbon films; Durability; Friction; Lubrication; Thermal stability; Wear

Indexed keywords

CARBON; COMPRESSIVE STRENGTH; DURABILITY; FRICTION; HYDROGENATION; LUBRICANTS; LUBRICATION; SILICON; THERMODYNAMIC STABILITY; TRIBOLOGY; WEAR OF MATERIALS;

EID: 0030737171     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0301-679X(96)00017-5     Document Type: Article
Times cited : (103)

References (24)
  • 1
    • 0028462087 scopus 로고
    • Tribological behavior of amorphous hydrogenated carbon films on silicon
    • Gangopadhyay A.K., Vassell W.C., Tamor M.A. and Willermet P.A. Tribological behavior of amorphous hydrogenated carbon films on silicon. J. Tribol. 1994, 116, 454
    • (1994) J. Tribol. , vol.116 , pp. 454
    • Gangopadhyay, A.K.1    Vassell, W.C.2    Tamor, M.A.3    Willermet, P.A.4
  • 2
    • 0029328929 scopus 로고
    • Tribological properties of diamond-like carbon films deposited on silicon using r.f. plasma enhanced CVD
    • Silva S.R.P., Kapoor A. and Amaratunga G.A.J. Tribological properties of diamond-like carbon films deposited on silicon using r.f. plasma enhanced CVD. Surf. Coat. Technol. 1995, 73, 132
    • (1995) Surf. Coat. Technol. , vol.73 , pp. 132
    • Silva, S.R.P.1    Kapoor, A.2    Amaratunga, G.A.J.3
  • 4
    • 0027990149 scopus 로고
    • Friction and wear performance of ion-beam deposited diamond-like carbon films on steel substrates
    • Erdemir A., Nichols F.A., Pan X.Z., Wei R. and Wilbur P. Friction and wear performance of ion-beam deposited diamond-like carbon films on steel substrates. Diam. Rel. Mater. 1993, 3, 119
    • (1993) Diam. Rel. Mater. , vol.3 , pp. 119
    • Erdemir, A.1    Nichols, F.A.2    Pan, X.Z.3    Wei, R.4    Wilbur, P.5
  • 5
    • 0026853341 scopus 로고
    • The effect of beam energy and substrate temperature on the tribological properties of hard carbon films on aluminum
    • Wei R., Wilbur P.J., Erdemir A. and Kustas F.M. The effect of beam energy and substrate temperature on the tribological properties of hard carbon films on aluminum. Surf. Coat. Technol. 1992, 51, 139
    • (1992) Surf. Coat. Technol. , vol.51 , pp. 139
    • Wei, R.1    Wilbur, P.J.2    Erdemir, A.3    Kustas, F.M.4
  • 6
    • 0025519433 scopus 로고
    • Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition
    • Oguri K. and Arai T. Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition. J. Mater. Res. 1990, 5, (11), 2567
    • (1990) J. Mater. Res. , vol.5 , Issue.11 , pp. 2567
    • Oguri, K.1    Arai, T.2
  • 7
    • 0026205045 scopus 로고
    • Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapor deposition
    • Oguri K. and Arai T. Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapor deposition. Surf. Coat. Technol. 1991, 47, 710
    • (1991) Surf. Coat. Technol. , vol.47 , pp. 710
    • Oguri, K.1    Arai, T.2
  • 8
    • 0026870358 scopus 로고
    • Two different low friction mechanisms of diamond-like carbon with silicon coatings formed by plasma-assisted chemical vapor deposition
    • Oguri K. and Arai T. Two different low friction mechanisms of diamond-like carbon with silicon coatings formed by plasma-assisted chemical vapor deposition. J. Mater. Res. 1992, 7, (6), 1313
    • (1992) J. Mater. Res. , vol.7 , Issue.6 , pp. 1313
    • Oguri, K.1    Arai, T.2
  • 9
    • 0026839034 scopus 로고
    • Characterization of metal containing amorphous hydrogenated carbon films
    • Wang M., Schmidt K., Reichelt K., Dimigen H. and Hubsch H. Characterization of metal containing amorphous hydrogenated carbon films. J. Mater. Res. 1992, 7, (3), 667
    • (1992) J. Mater. Res. , vol.7 , Issue.3 , pp. 667
    • Wang, M.1    Schmidt, K.2    Reichelt, K.3    Dimigen, H.4    Hubsch, H.5
  • 10
    • 0026819575 scopus 로고
    • Friction coefficient of Si-C, Ti-C and Ge-C coatings with excess carbon formed by plasma-assisted chemical vapor deposition
    • Oguri K. and Arai T. Friction coefficient of Si-C, Ti-C and Ge-C coatings with excess carbon formed by plasma-assisted chemical vapor deposition. Thin Solid Films 1992, 208, 158
    • (1992) Thin Solid Films , vol.208 , pp. 158
    • Oguri, K.1    Arai, T.2
  • 11
    • 0000164894 scopus 로고
    • Microstructure and physical properties of metal-containing hydrogenated carbon films
    • Klages C.P. and Memming R. Microstructure and physical properties of metal-containing hydrogenated carbon films. Mater. Sci. Forum 1989, 52 & 53, 609
    • (1989) Mater. Sci. Forum , vol.52-53 , pp. 609
    • Klages, C.P.1    Memming, R.2
  • 12
    • 0026120905 scopus 로고
    • Adhesion of hydrogenated amorphous carbon films on silicon substrates and its enhancements
    • Wang, M., Jiang X. and Stritzker B. Adhesion of hydrogenated amorphous carbon films on silicon substrates and its enhancements. Thin Solid Films 1991, 197, 57
    • (1991) Thin Solid Films , vol.197 , pp. 57
    • Wang, M.1    Jiang, X.2    Stritzker, B.3
  • 13
    • 0346876237 scopus 로고
    • Tribological and electrical properties of metal containing hydrogenated carbon films
    • Dimigen H., Hubsch H. and Memming R. Tribological and electrical properties of metal containing hydrogenated carbon films. Appl. Phys. Lett. 1987, 50, (16), 1056
    • (1987) Appl. Phys. Lett. , vol.50 , Issue.16 , pp. 1056
    • Dimigen, H.1    Hubsch, H.2    Memming, R.3
  • 14
  • 15
    • 0025237934 scopus 로고
    • A new method for analyzing data from continuous depth-sensing microindentation tests
    • Joslin D.L. and Oliver W.C. A new method for analyzing data from continuous depth-sensing microindentation tests. J. Mater. Res. 1990, 5, (1), 123
    • (1990) J. Mater. Res. , vol.5 , Issue.1 , pp. 123
    • Joslin, D.L.1    Oliver, W.C.2
  • 16
    • 84974183414 scopus 로고
    • A method for interpreting the data from depth-sensing indentation instruments
    • Doerner M.F. and Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1986, 1, (4), 601
    • (1986) J. Mater. Res. , vol.1 , Issue.4 , pp. 601
    • Doerner, M.F.1    Nix, W.D.2
  • 17
    • 0023773545 scopus 로고
    • A comparison of methods for determining wear volumes and surface parameters of spherically tipped sliders
    • Whittenton E.P. and Blau P.J. A comparison of methods for determining wear volumes and surface parameters of spherically tipped sliders. Wear 1988, 124, 291
    • (1988) Wear , vol.124 , pp. 291
    • Whittenton, E.P.1    Blau, P.J.2
  • 19
    • 0028733693 scopus 로고
    • Mechanical property characterization of thin films using spherical tipped indenters
    • Swain M.V. and Mencik J. Mechanical property characterization of thin films using spherical tipped indenters. Thin Solid Films 1994, 253, 204
    • (1994) Thin Solid Films , vol.253 , pp. 204
    • Swain, M.V.1    Mencik, J.2
  • 20
    • 0018330858 scopus 로고
    • Friction, deformation and fracture of single-crystal silicon carbide
    • Miyoshi K.and Buckley D.H. Friction, deformation and fracture of single-crystal silicon carbide. ASLE Trans. 1979, 22, (1), 79
    • (1979) ASLE Trans. , vol.22 , Issue.1 , pp. 79
    • Miyoshi, K.1    Buckley, D.H.2
  • 21
    • 0001953731 scopus 로고
    • Plasma deposition, properties and structure of amorphous hydrogenated carbon films
    • Koidl P., Wild Ch., Dischler B., Wagner J. and Ramsteiner M. Plasma deposition, properties and structure of amorphous hydrogenated carbon films. Mater. Sci. Forum 1989, 52 & 53, 41
    • (1989) Mater. Sci. Forum , vol.52-53 , pp. 41
    • Koidl, P.1    Wild, Ch.2    Dischler, B.3    Wagner, J.4    Ramsteiner, M.5
  • 22
    • 0001093698 scopus 로고
    • Gas evolution from hydrogenated amorphous carbon films
    • Jiang X., Beyer W. and Reichelt K. Gas evolution from hydrogenated amorphous carbon films. J. Appl. Phys. 1990, 68, 1378
    • (1990) J. Appl. Phys. , vol.68 , pp. 1378
    • Jiang, X.1    Beyer, W.2    Reichelt, K.3
  • 23
    • 0025516957 scopus 로고
    • Optical and tribological properties of heat treated diamond-like carbon films
    • Grill A., Patel V. and Meyerson B.S. Optical and tribological properties of heat treated diamond-like carbon films. J. Mater. Res. 1990, 5, (11), 2531
    • (1990) J. Mater. Res. , vol.5 , Issue.11 , pp. 2531
    • Grill, A.1    Patel, V.2    Meyerson, B.S.3
  • 24
    • 0042974682 scopus 로고
    • Properties of polymeric layers of hydrogenated amorphous carbon produced by a plasma-activated chemical vapor deposition process II. Tribological and mechanical properties
    • Memming R., Tolle H.J. and Wierenga P.E. Properties of polymeric layers of hydrogenated amorphous carbon produced by a plasma-activated chemical vapor deposition process II. Tribological and mechanical properties. Appl. Phys. Lett. 1986, 50, (16), 1056
    • (1986) Appl. Phys. Lett. , vol.50 , Issue.16 , pp. 1056
    • Memming, R.1    Tolle, H.J.2    Wierenga, P.E.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.