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Volumn 79, Issue 3, 2001, Pages 353-355
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On the mechanism of the cubic phase formation in the boron nitride thin-film systems
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CUBIC BORON NITRIDE;
DEPOSITION;
ELASTIC MODULI;
ELECTRON CYCLOTRON RESONANCE;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
ION BOMBARDMENT;
NUCLEATION;
PLASMA SOURCES;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
SUBSTRATES;
THERMAL EFFECTS;
CUBIC PHASE FORMATION;
NITROGEN ION IRRADIATION;
THIN FILMS;
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EID: 0035898516
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1386403 Document Type: Article |
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Times cited : (11)
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References (23)
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