Controlling stress in cubic boron nitride coatings

Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 137-141

  Clarke, Roy ^a   Litvinov, Dmitri ^a   Taylor, Charles ^b   Barlett, Darryl ^b   Inspektor, Aharon ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b k Space Associates Inc   (United States)

^c KENNAMETAL INC   (United States)

Author keywords

Cubic boron nitride; Ion assisted plasma deposition; Stress

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; FILM GROWTH; INORGANIC COATINGS; ION BEAM ASSISTED DEPOSITION; LASER BEAMS; NUCLEATION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; STRESSES; SURFACE ROUGHNESS;

ION-ASSISTED PLASMA DEPOSITION;

CUBIC BORON NITRIDE;

EID: 17744405831     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01424-9     Document Type: Article

References (28)