Fabrication, Characterization, and Thermal Failure Analysis of a Micro Hot Plate Chemical Sensor Substrate

Journal of the Electrochemical Society

Volumn 151, Issue 3, 2004, Pages

  Weiller, Bruce H ^a   Fuqua, Peter D ^a   Osborn, Jon V ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; FAILURE ANALYSIS; INFRARED DEVICES; METALLIZING; MICROMACHINING; POLYSILICON; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS;

MICRO HOT PLATE (MHP) SENSORS; THERMAL EFFICIENCY;

CHEMICAL SENSORS;

EID: 1842479620     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1644142     Document Type: Article

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