Hybrid processes based on plasma immersion ion implantation: A brief review

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 190-195

  Tian, X B ^a,b   Chu, Paul K ^b   Fu, Ricky ^b   Yang, S Q ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Cathodic arc; Hybrid processes; Nitriding; Plasma immersion ion implantation

Indexed keywords

AUSTENITE; COATING TECHNIQUES; CORROSION RESISTANCE; DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; VACUUM APPLICATIONS; WEAR RESISTANCE;

HIGH VOLTAGE GLOW DISCHARGES; PLASMA DEPOSITION; PLASMA IMMERSION ION IMPLANTATION (PIII); VACUUM ARCS;

PLASMA SOURCES;

PLASMA TREATMENT;

EID: 17644382656     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.049     Document Type: Article

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