Influence of ion an neutral flux on the properties of diamond-like carbon from pulsed glow discharges of acetylene

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 306-310

  Walter, Kevin C ^a   Nastasi, Michael ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Diamond like carbon (DLC); Hardness; Plasma deposition; Thin film

Indexed keywords

ACETYLENE; CARBON; DEPOSITION; DIAMONDS; HARDNESS; IONS; SPUTTERING;

NEUTRAL FLUXES;

COATINGS;

DIAMOND-LIKE CARBON; FILM; HARDNESS; PLASMA TREATMENT; TRIBOLOGY;

EID: 0036641586     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00095-6     Document Type: Article

References (7)