Challenges and progress toward a 250 kV, 100 kW plasma ion implantation facility

Surface and Coatings Technology

Volumn 85, Issue 1-2, 1996, Pages 111-119

  Matossian, Jesse N ^a   Wei, Ronghua ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

Plasma ion implantation; Surface modification; Tribology

Indexed keywords

COST EFFECTIVENESS; FACILITIES; HARDNESS; NITROGEN; PLASMA SOURCES; PLASMAS; SURFACE PROPERTIES; SURFACE TREATMENT; TRIBOLOGY; WEAR OF MATERIALS; X RAY PRODUCTION;

ENERGY TO ION RATIO; OMNIDIRECTIONAL ION IMPLANTATION; PLASMA ION IMPLANTATION; WEAR LIFE;

ION IMPLANTATION;

EID: 0030296036     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(96)02873-3     Document Type: Article

References (28)

1. J.R. Reeber and K. Sridharan, Adv. Mater. Processes, 146(6) (1994) 21.
2. S.M. Malik, K. Sridharan, R.P. Fetherston, A. Chen and J.R. Conrad, J. Vac. Sci. Technol. B, 12(2) (1994) 873.
3. B.P. Wood, I. Henins, R.J. Gribble, W.A. Reass, R.J. Faehl, M.A. Natasi and D.J. Rej, J. Vac. Sci. Technol. B, 12(2) (1994) 870.
4. J.N. Matossian, J. Vac. Sci. Technol. B, 12(2) (1994) 850.
5. J.N. Matossian, J.J. Vajo, J.A. Wysocki and M. Bellon, Surf. Coat. Technol., 62 (1993) 595.
6. J. Conrad, J. Radtke, R. Dodd and F. Worzala, J. Appl. Phys., 62(11) (1987) 4591.
7. J. Conrad and K. Sridharan (eds.), J. Vac. Sci. Technol. B, 12(2) (1994).
8. W. En and N.W. Cheung, Nucl. Instrum. Meth. B, 96 (1995) 435.
9. G.A. Emmert, J. Vac. Sci. Technol. B, 12(2) (1994) 880.
10. J.N. Matossian, R.W. Schumacher and D.M. Pepper, US Patent 5,347,456, 20 December 1994.
11. E.H. Lee, M.B. Lewis, P.J. Blau and L.K. Mansur, J. Mater. Res., 6(3) (1991) 610.
12. E.H. Lee, G.R. Rao and L.K. Mansur, J. Mater. Res., 7(7) (1992) 1900.
13. G.R. Rao, E.H. Lee and L.K. Mansur, Mater. Res. Soc. Symp. Proc., 239 (1992) 189.
14. R. Dagani, Chem. Eng. News, (9 Jan 1995) 24.
15. R. Wei, P.J. Wilbur, W.S. Sampath, D.L. Williamson, U. Qu and L. Wang, ASME J. Tribol., 112 (1990) 27.
16. D.L. Williamson, L. Wang, R. Wei and P.J. Wilbur, Mater. Lett., 9 (1990) 302.
17. R. Wei, P.J. Wilbur, O. Ozturk and D.L. Williamson, Nucl. Instrum. Meth. B, 59-60 (1991) 731.
18. J.N. Matossian and D.M. Goebel, Surf. Coat. Technol., this volume.
19. J.N. Matossian and R. Wei, Surf. Coat. Technol., this volume.
20. J.N. Matossian and J.J. Vajo, US Patent 5,455,061, 3 October 1995.
21. D. Gregoire, J.N. Matossian and J.D. Williams, to be published.
22. B.F. Gavin, in I.G. Brown (Ed.), Physics and Technology of Ion Sources, Wiley, New York, 1989.
23. C.C. Tsai, G.C. Barber, E.H. Lee, L.K. Mansur, D.E. Schechter, W.L. Stirling, J.H. Whealton and J.M. Williams, Bull. APS 37th Annual Meeting, Div. Plasma Physics, 6-10 Nov. 1995, Louisville, KY, Poster 2R1.
24. A. Li-Scholz (Ed.), At. Data Nucl. Data Tables, 36(2) (1987).
25. J.N. Matossian and D.M. Goebel, US Patent 5,218,179, 8 June 1993.
26. J.N. Matossian and D.M. Goebel, US Patent 5,296,272, 22 March 1994.
27. M. Kaminsky, Atomic and Ionic Impact Phenomena on Metal Surfaces, Academic Press, New York, 1965.
28. J.N. Matossian and J.D. Williams, US Patent 5,498,290, 12 March 1996.