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Volumn 34, Issue 3, 2001, Pages 354-359
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Experimental investigation of the electrical characteristics and initiation dynamics of pulsed high-voltage glow discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ION IMPLANTATION;
NITRIDING;
PLASMA APPLICATIONS;
CHILD-LANGMUIR RELATIONSHIP;
GLOW DISCHARGES;
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EID: 0034825826
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/34/3/318 Document Type: Article |
Times cited : (28)
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References (26)
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