Experimental investigation of the electrical characteristics and initiation dynamics of pulsed high-voltage glow discharge

Journal of Physics D: Applied Physics

Volumn 34, Issue 3, 2001, Pages 354-359

  Tian, X B ^a   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ION IMPLANTATION; NITRIDING; PLASMA APPLICATIONS;

CHILD-LANGMUIR RELATIONSHIP;

GLOW DISCHARGES;

EID: 0034825826     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/3/318     Document Type: Article

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