Effects of energetic species during the growth of nitrogenated amorphous carbon thin films on their nanomechanical properties

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 177-182

  Charitidis, C ^a   Patsalas, P ^a   Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Carbon; Ion bombardment; Sputtering; Tribology

Indexed keywords

CARBON NITRIDE; CONCENTRATION (PROCESS); FRICTION; ION BOMBARDMENT; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURE; REFLECTION; THIN FILMS; TRIBOLOGY; X RAYS;

ENERGETIC SPECIES; NANOMECHANICAL PROPERTIES; VOLUME RATIOS; WEAR-RESISTANT;

CARBON;

EID: 17644378060     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.167     Document Type: Conference Paper

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