Effects of increasing nitrogen concentration on the structure of carbon nitride films deposited by ion beam assisted deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2277-2287

  Hammer, P ^a   Victoria, N M ^a   Alvarez, F ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DEPOSITION; INFRARED SPECTROSCOPY; ION BEAMS; MATHEMATICAL MODELS; MICROSTRUCTURE; NITROGEN; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; NITROGEN CONCENTRATION;

THIN FILMS;

EID: 0034272617     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1285993     Document Type: Article

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