SABCMS, a new approach to higher lateral resolution of laser probe measurement system

Sensors and Actuators, A: Physical

Volumn 120, Issue 1, 2005, Pages 17-25

  Zhao, Weiqian ^a   Tan, Jiubin ^a   Qiu, Lirong ^a   Jin, Peng ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Binary optical element; Confocal microscope; Laser probe measurement; SABCMS; Superresolution; Surface contour; Ultraprecision measurement

Indexed keywords

BESSEL FUNCTIONS; LASER BEAMS; MEASUREMENT THEORY; MICROSCOPES; MICROSTRUCTURE; OPTICAL MICROSCOPY; PROBES;

BINARY OPTICAL ELEMENT; CONFOCAL MICROSCOPES; LASER PROBE MEASUREMENTS; SHAPED ANNULAR BEAM CONFOCAL MEASUREMENT SYSTEM (SABCMS); SUPERRESOLUTION; ULTRAPRECISION MEASUREMENTS;

LASER APPLICATIONS;

EID: 17444374612     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.002     Document Type: Article

References (22)

1. D.K. Hamilton, and T. Wilson Three-dimensional surface measurement using the confocal scanning microscopy Appl. Phys. B 27 1982 211 213
2. C.J.R. Sheppard, and H.J. Matthews The extend-focus, auto-focus and surface-profiling techniques of confocal microscopy J. Mod. Opt. 35 1988 145 154
3. T. Wilson Confocal Microscopy 1990 Academic Press London (Chapter 1) pp. 1-60
4. H.-J. Jordan, M. Wegner, and H. Tiziani Highly accurate non-contact characterization of engineering surfaces using confocal microscopy Meas. Sci. Technol. 9 1998 1142 1151
5. H.J. Tiziani, M. Wegner, and D. Steudie Confocal principle for macro- and microscopic surface and defect analysis Opt. Eng. 39 2000 32 39
6. C.H. Lee, and J.P. Wang Noninterferometric differential confocal microscopy with 2 nm depth resolution Opt. Commun. 35 1997 233 237
7. G. Udupa, M. Singaperumal, R.S. Sirohi, and M.P. Kothiyal Characterization of surface topography by confocal microscopy. I. Principles and the measurement system Meas. Sci. Technol. 11 2000 305 314
8. G. Udupa, M. Singaperumal, R.S. Sirohi, and M.P. Kothiyal Characterization of surface topography by confocal microscopy. II. The micro and macro surface irregularities Meas. Sci. Technol. 11 2000 315 329
9. F. Wang, J. Tan, and W. Zhao The optical probe using confocal technique for surface profile measurement Proc. SPIE 4222 2000 194 197
10. J. Tan, and F. Wang Theoretical analysis and property study of optical focus detection based on differential confocal microscopy Meas. Sci. Technol. 13 2002 1289 1293
11. J. Tan, and J. Zhang A small probe with a gradient index lens for confocal measurement Sens. Actuators A 104 2003 121 126
12. J. Tan, and J. Zhang Differential confocal optical system using gradient-index lenses Opt. Eng. 42 2003 2868 2871
13. E. Higurashi, R. Sawada, and T. Ito Nanometer-displacement detection of optically trapped metallic particles based on critical angle method for small force detection Rev. Sci. Instrum. 70 1999 3068 3073
14. K.C. Fan, C.Y. Lin, and L.H. Shyu The development of a low-cost focusing probe for profile measurement Meas. Sci. Technol. 11 2000 N1 N7
15. V. Sainov, and N. Mechkarov CD-R groove measurement by phase stepping interferometry Opt. Laser Eng. 36 2001 429 435
16. T. Wilson, and S.J. Hewlett Superresolution in confocal scanning microscopy Opt. Lett. 16 1996 1062 1064
17. M. Martýnez-Corral, P. Andres, and C.J. Zapata-Rodrýguez Three-dimensional superresolution by annular binary filters Opt. Commun. 165 1999 267 278
18. T.R.M. Sales, and G.M. Morris Fundamental limits of optical superresolution Opt. Lett. 22 1997 582 584
19. H. Wang New approach to supperresolution Opt. Eng. 40 2001 851 855
20. D. Mendlovic, D. Farkas, Z. Zalevsky, and A. Lohmann High-frequency enhancement by an optical system for superresolution of temporally restricted objects Opt. Lett. 23 1998 801 803
21. D.M. de Juana, J.E. Oti, V.F. Canales, and M.P. Cagigal Design of superresolving continuous phase filters Opt. Lett. 28 2003 607 609
22. W. Zhao Key measurement technique for ultraprecision discontinuous cylindrical form Doctor Degree Dissertation 2003 Harbin Institute of Technology Harbin pp. 31-38