Theoretical analysis and property study of optical focus detection based on differential confocal microscopy

Measurement Science and Technology

Volumn 13, Issue 8, 2002, Pages 1289-1293

  Tan, Jiubin ^a   Wang, Fusheng ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Confocal microscopy; Differential detection; Focus error signal; Optical probe

Indexed keywords

FOCUSING; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; SIGNAL TO NOISE RATIO;

DIFFERENTIAL CONFOCAL MICROSCOPY (DCM); OPTICAL FOCUS DETECTION;

PROFILOMETRY;

MICROSCOPY; OPTICAL FEATURE;

EID: 0036678876     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/13/8/317     Document Type: Article

References (20)