Optical probe using differential confocal technique for surface profile

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4222, Issue , 2000, Pages 194-197

  Wang, Fusheng ^a   Tan, Jiubin ^a   Zhao, Weiqian ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NUMERICAL ANALYSIS; OPTICAL COLLIMATORS; PROBES; PROFILOMETRY; SURFACE MEASUREMENT;

CONFOCAL AXIAL RESPONSE; DIFFERENTIAL CONFOCAL TECHNIQUE; NONCONTACT MEASUREMENT; OPTICAL PROBE; SURFACE PROFILING;

OPTICAL INSTRUMENTS;

EID: 0034459232     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.403872     Document Type: Conference Paper

References (10)