Confocal principle for macro- and microscopic surface and defect analysis

Optical Engineering

Volumn 39, Issue 1, 2000, Pages 32-39

  Tiziani, Hans J ^a   Wegner, Michael ^a   Steudle, Daniela ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COLOR; OPTICAL MICROSCOPY; OPTICAL SYSTEMS;

CONFOCAL MICROSCOPY; MICROLENSES;

OPTICAL INSTRUMENT LENSES;

EID: 0033900897     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602332     Document Type: Article

References (11)

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