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Volumn 11, Issue 1, 2000, Pages

The development of a low-cost focusing probe for profile measurement

Author keywords

CD pick up head; Focus error; Focusing probe; Precision measurement

Indexed keywords

FOCUSING; MEASUREMENT ERRORS; PRECISION ENGINEERING; PROBES; STATISTICAL METHODS;

EID: 0033723276     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/1/401     Document Type: Article
Times cited : (74)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.