Characterization of surface topography by confocal microscopy: II. The micro and macro surface irregularities

Measurement Science and Technology

Volumn 11, Issue 3, 2000, Pages 315-329

  Udupa, Ganesha ^a   Singaperumal, M ^b   Sirohi, R S ^b   Kothiyal, M P ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Confocal microscopy; Numerical characterization; Roughness and roundness parameters; Surface topography

Indexed keywords

FOCUSING; MEASUREMENT ERRORS; OPTICAL MICROSCOPY; PARAMETER ESTIMATION;

CONFOCAL SCANNING OPTICAL MICROSCOPES;

ROUGHNESS MEASUREMENT;

EID: 0033691056     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/3/321     Document Type: Article

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