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Volumn 42, Issue 10, 2003, Pages 2868-2871
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Differential confocal optical system using gradient-index lenses
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Author keywords
Differential confocal microscopy; Gradient index lens; Noncontact measurement; Optical probe
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Indexed keywords
COORDINATE MEASURING MACHINES;
GRADIENT INDEX OPTICS;
INSPECTION EQUIPMENT;
LENSES;
ONLINE SYSTEMS;
OPTICAL DESIGN;
OPTICAL MICROSCOPY;
OPTICAL SENSORS;
PROBES;
SURFACE ROUGHNESS;
CONFOCAL MEASUREMENT SYSTEM;
DIFFERENTIAL CONFOCAL MICROSCOPY;
GRADIENT INDEX LENSES;
OPTICAL INSPECTION SYSTEM;
OPTICAL SYSTEMS;
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EID: 0344946465
PISSN: 00913286
EISSN: None
Source Type: Journal
DOI: 10.1117/1.1602459 Document Type: Article |
Times cited : (10)
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References (7)
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