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Volumn 42, Issue 10, 2003, Pages 2868-2871

Differential confocal optical system using gradient-index lenses

Author keywords

Differential confocal microscopy; Gradient index lens; Noncontact measurement; Optical probe

Indexed keywords

COORDINATE MEASURING MACHINES; GRADIENT INDEX OPTICS; INSPECTION EQUIPMENT; LENSES; ONLINE SYSTEMS; OPTICAL DESIGN; OPTICAL MICROSCOPY; OPTICAL SENSORS; PROBES; SURFACE ROUGHNESS;

EID: 0344946465     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1602459     Document Type: Article
Times cited : (10)

References (7)
  • 3
    • 0029226886 scopus 로고
    • Calibration of step-height standards for nanometrology using interference microscopy and stylus profilometry
    • U. Brand and W. Hillmann, "Calibration of step-height standards for nanometrology using interference microscopy and stylus profilometry," Precis. Eng. 17, 23-33 (1995).
    • (1995) Precis. Eng. , vol.17 , pp. 23-33
    • Brand, U.1    Hillmann, W.2
  • 4
    • 0025799050 scopus 로고
    • Noncontact optical probe with holographic optical element
    • B. H. Zhang, "Noncontact optical probe with holographic optical element," CIRP Ann. 40, 483-486 (1991).
    • (1991) CIRP Ann. , vol.40 , pp. 483-486
    • Zhang, B.H.1
  • 5
    • 0027639216 scopus 로고
    • Recent developments in profiling optical surfaces
    • J. M. Bennett, V. Elings, and K. Kjoller, "Recent developments in profiling optical surfaces," Appl. Opt. 32, 3442-3447 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 3442-3447
    • Bennett, J.M.1    Elings, V.2    Kjoller, K.3
  • 6
    • 0001725322 scopus 로고
    • Effect of detector displacement in confocal imaging system
    • T. Wilson and A. R. Carlini, "Effect of detector displacement in confocal imaging system," Appl. Opt. 27 (18), 3791-3799 (1988).
    • (1988) Appl. Opt. , vol.27 , Issue.18 , pp. 3791-3799
    • Wilson, T.1    Carlini, A.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.