Single high aspect ratio pillar support structures

Proceedings - Electrochemical Society

Volumn 9, Issue , 2004, Pages 31-41

  Northen, M T ^a   Turner, K L ^b  

^a University of California   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP-SCALE MICROADHESIVES; DIGITAL SCANNING MICROSCOPES; SINGLE HIGH ASPECT RATIO SUPPORT (SHARPS); TRIBOINDENTERS;

ADHESION; ASPECT RATIO; DRY ETCHING; INDUCTIVELY COUPLED PLASMA; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; PHOTORESISTS; PROFILOMETRY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SILICA; SILICON; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ELECTROCHEMISTRY;

EID: 17044432669     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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