Mechanical behavior of microfabricated Si/SiO2 mushroom structures

Sensors and Actuators, A: Physical

Volumn 107, Issue 1, 2003, Pages 80-84

  Saul, Cyro Ketzer ^a   Lepienski, Carlos Mauricio ^a   Cantão, Maurício Pereira ^b   Schreiner, Wido H ^a  

^a FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

^b Inst Tecn para o Desenvovimento   (Brazil)

Author keywords

Mechanical properties; MEMS; Nanoindentation; SiO2 membranes

Indexed keywords

FABRICATION; INDENTATION; MOLECULAR STRUCTURE; SILICA;

MICROFABRICATION PROCESSES;

SILICON WAFERS;

EID: 0043284128     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00300-5     Document Type: Article

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