Microsystem technology as a road from macro to nanoworld

Bioelectrochemistry

Volumn 66, Issue 1-2 SPEC. ISS., 2005, Pages 23-28

  Grabiec, Piotr ^a   Domański, Krzysztof ^a   Janus, Paweł ^a   Zaborowski, Michał ^a   Jaroszewicz, Bogdan ^a  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

Microsystem technology; Surface characterization

Indexed keywords

BIOMEDICAL ENGINEERING; MEDICAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY;

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICRO-ELECTRO-OPTO MECHANICAL SYSTEMS (MOEMS); MICROELECTRONIC TECHNOLOGY;

MICROELECTRONICS;

NANOPARTICLE;

ANALYTIC METHOD; CALORIMETER; CONFERENCE PAPER; ELECTRIC CURRENT; ELECTRONIC SENSOR; INFRARED SPECTROSCOPY; MICROELECTRODE; OSCILLATORY POTENTIAL; PIEZOELECTRICITY; SCANNING FORCE MICROSCOPY; SCANNING NEAR FIELD OPTICAL MICROSCOPY; THERMAL ANALYSIS; THERMAL CONDUCTIVITY;

EID: 17044393498     PISSN: 15675394     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.bioelechem.2004.05.010     Document Type: Conference Paper

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