A novel pH sensitive ISFET with on chip temperature sensing using CMOS standard process

Sensors and Actuators, B: Chemical

Volumn 76, Issue 1-3, 2001, Pages 582-593

  Chin, Yuan Lung ^a   Chou, Jung Chuan ^b   Sun, Tai Ping ^c   Chung, Wen Yaw ^a   Hsiung, Shen Kan ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

CMOS; DPDM; Ion sensitive field effect transistor (ISFET); p n Diode; pH sensor

Indexed keywords

CMOS INTEGRATED CIRCUITS; ION SENSITIVE FIELD EFFECT TRANSISTORS; READOUT SYSTEMS; TEMPERATURE MEASUREMENT;

DOUBLE POLY DOUBLE METAL (DPDM);

PH SENSORS;

EID: 0035368321     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00639-6     Document Type: Conference Paper

References (37)

1. Develop of an ion-sensitive solid state device for neurophysilogical measurement
2. ISFET temperature characteristics
3. A pH-ISFET sensor with on-chip temperature sensing, IEEE Engineering
4. Analysis of the threshold voltage and its temperature dependence in electrolyte-insulator-semiconductor field effect transistors (EISFET's)
5. An experimental determination of absolute half-cell EMF's and single ion free energies of solvation
6. The work function of immersed electrodes
7. +-sensitive FET's with SPICE
8. 3/electrolyte interface
9. The operation of an ISFET as an electronic device
10. Temperature dependence of the MOS mobility degradation
11. Effects of operating temperature on electrical parameters in an analog process
12. 4-gate pH-ISFET
13. Temperature effect of a Si:H pH-ISFET
14. Investigation of the dynamic response behaviour of ISFET pH sensors by means of laser Doppler velocimety (LDV)
15. Glass pH electrodes with improved temperature characteristics: Use of a low-impedance pH sensor as the inner reference electrode
16. Temperature effects on the ISFET behaviour: Simulations and measurements
17. A multi-species biosensor with extended gate field effect transistors
18. A CMOS-integrated "ISFET-operational amplifier" chemical sensor employing differential sensing
19. Using a CMOS ASIC technology for the development of an integrated ISFET sensor
20. Multi-layer ISFET membranes for microsystems applications
21. A process for the combined fabrication of ion sensor and CMOS circuits
22. 2 gate ISFET
23. High pH sensitivity of the amorphous tin oxide thin film obtained by thermal vacuum evaporation
24. 2 gate ISFETs applications
25. Study of amorphous tin oxide thin films for ISFET applications
26. PZC and surface potential of tin oxide gate ISFET
27. An integrated micro multi-ion sensor using platinum-gate field effect transistor
28. A very large integrated pH-ISFET sensor array chip compatible with standard CMOS process
29. Ion-sensitive field effect transistors fabricated in a commercial CMOS technology
30. New ISFET sensor interface circuit for biomedical applications
31. 2/Si ISFET with a metal light shield