Multifunctional AFM/SNOM cantilever probes: fabrication and measurements

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 183-186

  Stopka, M ^a   Drews, D ^a   Mayr, K ^a   Lacher, M ^a   Ehrfeld, W ^a   Kalkbrenner, T ^b   Graf, M ^b   Sandoghdar, V ^b   Mlynek, J ^b  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRONIC EQUIPMENT MANUFACTURE; GOLD; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; OPTICAL WAVEGUIDES; PROBES; SILICA; SILICON NITRIDE;

INTEGRATED OPTICAL WAVEGUIDE; OPTICAL BEAM DEFLECTION; SCANNING NEAR FIELD OPTICAL MICROSCOPY; TRANSPARENT POLYMER MATRIX;

NANOTECHNOLOGY;

EID: 0034205566     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00292-6     Document Type: Article

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7. rd International Conference on Micro Opto Electro Mechanical Systems (MOEMS) 1999, Mainz, Germany.
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