From microsensors to microinstruments

Sensors and Actuators, A: Physical

Volumn 56, Issue 1-2, 1996, Pages 143-149

  Petersen, Kurt ^a  

^a CEPHEID   (United States)

Author keywords

Microelectromechanical systems; Microinstruments; Microsensors

Indexed keywords

MICROMACHINING; PRESSURE TRANSDUCERS; SILICON SENSORS;

MICROINSTRUMENTS; PRESSURE SENSORS; SILICON MICROMACHINED DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030205547     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01289-7     Document Type: Article

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