SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 214-218

High-dose ion implantation into GaN

(5) Kucheyev, S O a Williams, J S a Zou, J b Jagadish, C a Li, G c

a AUSTRALIAN NATIONAL UNIVERSITY (Australia)

b UNIVERSITY OF SYDNEY (Australia)

c Ledex Corporation (Taiwan)

Author keywords

Decomposition; Defects; Erosion; GaN; Implantation; Porosity

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; GALLIUM NITRIDE; ION BOMBARDMENT; ION IMPLANTATION; POROSITY; POROUS MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

RUTHERFORD BACKSCATTERING/CHANNELING SPECTROMETRY;

SEMICONDUCTING FILMS;

EID: 16744367799 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(00)00672-8 Document Type: Conference Paper

Times cited : (19)

References (17)

1
- 0005985130
- and references therein
- (1999) J. Appl. Phys. , vol.86 , pp. 1
- Pearton, S.J.¹ Zolper, J.C.² Shul, R.J.³ Ren, F.⁴

2
- 0006016142
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2364
- Tan, H.H.¹ Williams, J.S.² Zou, J.³ Cockayne, D.J.⁴ Pearton, S.J.⁵ Stall, R.A.⁶

3
- 0031547830
- (1997) Nucl. Instr. and Meth. B , vol.127-128 , pp. 463
- Parikh, N.¹ Suvkhanov, A.² Lioubtchenko, M.³ Carlson, E.⁴ Bremser, M.⁵ Bray, D.⁶ Davis, R.⁷ Hunn, J.⁸

4
- 0001288478
- (1998) Mater. Res. Soc. Symp. Proc. , vol.512 , pp. 475
- Suvkhanov, A.¹ Hunn, J.² Wu, W.³ Thomson, D.⁴ Price, K.⁵ Parikh, N.⁶ Irene, E.⁷ Davis, R.F.⁸ Krasnobaev, L.⁹

5
- 0000677643
- (1998) Phys. Rev. B , vol.57 , pp. 2530
- Liu, C.¹ Mensching, B.² Zeitler, M.³ Volz, K.⁴ Rauschenbach, B.⁵

6
- 0001569951
- (1999) MRS Internet J. Nitride Semicond. Res. , vol.4 S1
- Jiang, W.¹ Weber, W.J.² Thevuthasan, S.³ Exarhos, G.J.⁴ Bozlee, B.J.⁵

7
- 0000058054
- (1999) MRS Internet J. Nitride Semicond. Res. , vol.4 S1
- Wampler, W.R.¹ Myers, S.M.²

8
- 0033528957
- (1999) Mater. Sci. and Eng. B , vol.59 , pp. 191
- Wenzel, A.¹ Liu, C.² Rauschenbach, B.³

9
- 85003766069
- (2000) J. Appl. Phys. , vol.87 , pp. 7671
- Jiang, W.¹ Weber, W.J.² Thevuthasan, S.³

10
- 0000765291
- (2000) Appl. Phys. Lett. , vol.76 , pp. 3899
- Kucheyev, S.O.¹ Williams, J.S.² Jagadish, C.³ Li, G.⁴ Pearton, S.J.⁵

11
- 0034431461
- (2000) Mat. Res. Soc. Symp. Proc. , vol.622
- Kucheyev, S.O.¹ Williams, J.S.² Jagadish, C.³ Zou, J.⁴ Toth, M.⁵ Phillips, M.R.⁶ Tan, H.H.⁷ Li, G.⁸ Pearton, S.J.⁹

12
- 0000817470
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1455
- Kucheyev, S.O.¹ Williams, J.S.² Jagadish, C.³ Zou, J.⁴ Craig, V.S.J.⁵ Li, G.⁶

13
- 0034664589
- (2000) Phys. Rev. B , vol.62 , pp. 7510
- Kucheyev, S.O.¹ Williams, J.S.² Jagadish, C.³ Zou, J.⁴ Li, G.⁵

14
- 0035334089
- in press
- (2001) Nucl. Instr. and Meth. B , vol.178
- Kucheyev, S.O.¹ Williams, J.S.² Zou, J.³ Jagadish, C.⁴ Li, G.⁵

15
- 0001637687
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3577
- Kucheyev, S.O.¹ Williams, J.S.² Zou, J.³ Jagadish, C.⁴ Li, G.⁵

16
- 0000224157
- (2001) Appl. Phys. Lett. , vol.78 , pp. 156
- Kucheyev, S.O.¹ Bradby, J.E.² Williams, J.S.³ Jagadish, C.⁴ Swain, M.V.⁵ Li, G.⁶

17
- 0001138179
- (2000) J. Appl. Phys. , vol.88 , pp. 5493
- Kucheyev, S.O.¹ Williams, J.S.² Jagadish, C.³ Zou, J.⁴ Li, G.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.