In situ ion channeling study of gallium disorder and gold profiles in Au-implanted GaN

Journal of Applied Physics

Volumn 87, Issue 11, 2000, Pages 7671-7678

  Jiang, W ^a   Weber, W J ^a   Thevuthasan, S ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

AMORTIZATION; ANNEALING; DIFFUSION; DOPED MATERIALS; GALLIUM NITRIDES; ION CHANNELING; ION IMPLANTATION; RADIATION EFFECTS; RUTHERFORD SCATTERING

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL STRUCTURE; GALLIUM NITRIDE; IRRADIATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE DEFECTS; THERMAL OIL RECOVERY;

AMORPHOUS SURFACES; ANNEALING BEHAVIOR; ELEVATED TEMPERATURE; EPITAXIAL REGROWTH; GALLIUM NITRIDES (GAN); IRRADIATION-INDUCED DEFECTS; MEAN PROJECTED RANGES; RUTHERFORD BACK-SCATTERING SPECTROMETRY;

ION IMPLANTATION;

EID: 85003766069     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.373439     Document Type: Article

References (28)

1. GaN and Related alloys, edited by S. J. Pearton, C. Kuo, A. F. Wright, and T. Uenoyama, (Materials Research Society, Pittsburgh, PA, 1999); Mater. Res. Soc. Symp. Proc. Vol. 537 (1999).
2. S. J. Pearton, J. C. Zolper, R. J. Shul, and F. Ren, J. Appl. Phys. JAPIAU 86, 1 (1999).
3. M. H. Zaldı́var, P. Fernández, J. Piqueras, and J. Solı́s, J. Appl. Phys. JAPIAU 85, 1120 (1999).
4. C. Bozdog et al., Phys. Rev. B PRBMDO 59, 12479 (1999).
5. M. G. Weinstein, C. Y. Song, M. Stavola, S. J. Pearton, R. G. Wilson, R. J. Shul, K. O. Killeen, and M. J. Ludowise, Appl. Phys. Lett. APPLAB 72, 1703 (1998).
6. W. Jiang, W. J. Weber, S. Thevuthasan, G. J. Exarhos, and B. J. Bozlee, Mater. Res. Soc. Symp. Proc. MRSPDH 537, G6. 15 (1999)
7. W. Jiang, W. J. Weber, S. Thevuthasan, G. J. Exarhos, and B. J. Bozlee, MRS Internet J. Nitride Semicond. Res. MIJNF7 4S1, G6. 15 (1999).
8. J. S. Chan et al., Appl. Phys. Lett. APPLAB 68, 2702 (1996).
9. C. Liu, B. Mensching, M. Zeitler, K. Voltz, and B. Rauschenbach, Phys. Rev. B PRBMDO 57, 2530 (1999).
10. J. T. Torvik, R. J. Feuerstein, C. H. Qiu, J. I. Pankove, and F. Namavar, J. Appl. Phys. JAPIAU 82, 1824 (1997).
11. O. W. Holland, D. Fathy, J. Narayan, and O. S. Oen, Radiat. Eff. RAEFBL 90, 127 (1985).
12. J. F. Ziegler, J. P. Biearsack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
13. Handbook of Modern Ion Beam Materials Analysis, edited by J. R. Tesmer and M. Nastasi (Materials Research Society, Pittsburgh, PA, 1995).
14. W. K. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978).
15. W. J. Weber, L. M. Wang, N. Yu, and N. J. Hess, Mater. Sci. Eng., A MSAPE3 253, 62 (1998).
16. W. J. Weber, N. Yu, and L. M. Wang, J. Nucl. Mater. JNUMAM 253, 53 (1998).
17. W. J. Weber, W. Jiang, S. Thevuthasan, and D. E. McCready, Mater. Res. Soc. Symp. Proc. MRSPDH 540, 159 (1999).
18. W. Jiang, W. J. Weber, S. Thevuthasan, and D. E. McCready, Nucl. Instrum. Methods Phys. Res. B NIMBEU 143, 333 (1998).
19. W. Jiang, W. J. Weber, S. Thevuthasan, and D. E. McCready, Nucl. Instrum. Methods Phys. Res. B NIMBEU 148, 562 (1999).
20. H. H. Tan, J. S. Williams, J. Zou, D. J. H. Cockayne, S. J. Pearton, and R. A. Stall, Appl. Phys. Lett. APPLAB 69, 2364 (1996).
21. W. Jiang, W. J. Weber, S. Thevuthasan, and D. E. McCready, Nucl. Instrum. Methods Phys. Res. B NIMBEU 148, 557 (1999).
22. W. J. Weber, Nucl. Instrum. Methods Phys. Res. B NIMBEU 166–167, 98 (2000).
23. J. K. N. Lindner, R. Domres, and E. H. Te Kaat, Nucl. Instrum. Methods Phys. Res. B NIMBEU 39, 306 (1989).
24. J. K. N. Lindner, Nucl. Instrum. Methods Phys. Res. B NIMBEU 112, 316 (1996).
25. J. C. Zolper, M. H. Crawford, J. S. Williams, H. H. Tan, and R. A. Stall, Nucl. Instrum. Methods Phys. Res. B NIMBEU 127/128, 467 (1997).
26. H. H. Tan, J. S. Williams, J. Zou, D. J. H. Cockayne, S. J. Pearton, J. C. Zolper, and R. A. Stall, Appl. Phys. Lett. APPLAB 72, 1190 (1998).
27. B. Mensching, C. Liu, B. Rauschenbach, K. Kornitzer, and W. Ritter, Mater. Sci. Eng. B MSBTEK 50, 105 (1997).
28. R. G. Wilson, S. J. Pearton, C. R. Abernathy, and J. M. Zavada, Appl. Phys. Lett. APPLAB 66, 2238 (1995).