Threshold ionization mass spectrometry of BrCN: Gas-phase reaction channels which determine the nitrogen contents in amorphous carbon nitride films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 8, 2002, Pages 5449-5450

  Ito, Haruhiko ^a   Sato, Akira ^a   Saitoh, Hidetoshi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Amorphous carbon nitride; BrCN; Dissociative ionization; Nitrogen content; Threshold ionization mass spectrometry

Indexed keywords

BROMINE COMPOUNDS; CARBON NITRIDE; DISSOCIATION; ELECTRON CYCLOTRON RESONANCE; ELECTRONS; IONIZATION; MASS SPECTROMETRY; NITROGEN; PLASMAS; REACTION KINETICS;

GAS-PHASE REACTIONS;

AMORPHOUS FILMS;

EID: 0036697525     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.5449     Document Type: Article

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