Theoretical analysis of the atomic force microscopy characterization of columnar thin films

Ultramicroscopy

Volumn 94, Issue 1, 2003, Pages 19-29

  Klapetek, Petr ^a,b   Ohlídal, Ivan ^a,b  

^a MASARYK UNIVERSITY   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

AFM; Boundary roughness; Columnar films

Indexed keywords

ATOMIC FORCE MICROSCOPY; PROBABILITY DENSITY FUNCTION; STATISTICAL METHODS;

SPECTRAL DENSITY FUNCTIONS;

THIN FILMS;

ALGORITHM; ARTICLE; ASSAY; ATOMIC FORCE MICROSCOPY; FILM; MICROSCOPE; MONTE CARLO METHOD; POWER SPECTRUM; PROBABILITY; QUANTITATIVE ANALYSIS; SIMULATION; SPECTROMETRY; STATISTICAL ANALYSIS;

EID: 0037212022     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(02)00159-6     Document Type: Article

References (17)

1. Franta D., Ohlídal I., Klapetek P., Pokorný P., Ohlídal M. Surf. Interface Anal. 32:2001;91.
2. Atanasov G., Turlo J., Fu J.K., Sh. Dai Y. Thin Solid Films. 342:1999;83.
3. Ting Ch., Chen S. J. Appl. Phys. 88:2000;4628.
4. Franta D., Ohlídal I. Surf. Interface Anal. 30:2000;574.
5. Bennett J.M., Tehrani M.M., Jahanmir J., Podlesny J.C., Balter T.L. Appl. Opt. 34:1995;209.
6. Rodríguez J., Gómez M., Ederth J., Niklasson G.A., Granqvist C.G. Thin Solid Films. 365:2000;119.
7. Zuber A., Janchen H., Kaiser N. Appl. Opt. 35:1996;5553.
8. Pulker H.K., Paesold G., Ritter E. Appl. Opt. 15:1976;2986.
9. Villarrubia J.S. J. Res. Natl. Inst. Stand. Technol. 102:1997;425.
10. Markiewicz P., Goh M.C. J. Vac. Sci. Technol. B. 13:1995;1115.
11. Nagy P., Márk G.I., Balázs E. Mikrochimica Acta Suppl. 13:1996;425.
12. Drotar J.T., Zhao Y.-P., Lu T.-M., Wang G.-C. Phys. Rev. B. 62:2000;2118.
13. Barabási A.-L., Stanley H.E. Fractal Concepts in Surface Growth. 1995;Cambridge University Press, Cambridge.
14. van Kampen N.G. Stochastic Processes in Physics and Chemistry. 1983;North-Holland Physics Publishing, Amsterdam.
15. Leinhan T.G., Malshe A.P., Brown W.D., Schaper L.W. Thin Solid Films. 270:1995;365.
16. Westra K.L., Thompson D.J. Thin Solid Films. 257:1995;15.
17. Sheiko S.S., Moler M., Reuvekamp E.M.C., Zandergen H.W. Ultramicroscopy. 53:1994;371.